Apparatus for generating/detecting THz wave and method of manufacturing the same
US8039802B2 · kind B2 · utility
2Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2010 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Apr 21, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/0837
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided are an apparatus for generating/detecting terahertz wave and a method of manufacturing the same. The apparatus includes a substrate, a photo conductive layer, a first electrode and a second electrode, and a lens. The photo conductive layer is formed on an entire surface of the substrate. The first electrode and a second electrode formed on the photo conductive layer. The first and second electrodes are spaced from each other by a certain gap. The lens is formed on the first and second electrodes. The lens is filled in the gap between the first and second electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.