Encapsulated active transducer and method of fabricating the same
US8040020B2 · kind B2 · utility
17Cited by
8References
20Claims
0Family size
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Key dates
| Filing date | Feb 17, 2010 |
| Grant date | Oct 18, 2011 |
| Priority date | — |
| Expiry date | Feb 17, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A micro-electromechanical systems (MEMS) ultrasonic transducer device includes a substrate defining an opening and an active transducer having multiple of active layers stacked over the opening of the substrate. The active transducer is completely encapsulated by multiple passivation layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.