Process for preparing trichloromonosilane
US8043591B2 · kind B2 · utility
1Cited by
8References
15Claims
0Family size
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Key dates
| Filing date | Apr 1, 2005 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Jan 16, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2004/61
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A process for preparing trichloromonosilane, in which silicon particles are reacted with hydrogen chloride in a fluidized bed reactor, wherein the silicon particles used are a silicon dust which is obtained as a waste product in the preparation of defined silicon particle size fractions from lump-form silicon and the silicon dust is introduced directly into the reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.