Patent · US Active

Process for preparing trichloromonosilane

US8043591B2 · kind B2 · utility

1Cited by
8References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 1, 2005
Grant dateOct 25, 2011
Priority date
Expiry dateJan 16, 2027

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC01P2004/61
  • WIPO fieldMaterials, metallurgy
  • WIPO sectorChemistry

Abstract

A process for preparing trichloromonosilane, in which silicon particles are reacted with hydrogen chloride in a fluidized bed reactor, wherein the silicon particles used are a silicon dust which is obtained as a waste product in the preparation of defined silicon particle size fractions from lump-form silicon and the silicon dust is introduced directly into the reactor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.