Patterned chemical bath deposition of a textured thin film from a printed seed layer
US8043889B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 28, 2010 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Jul 28, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/50
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A chemical bath deposition (CBD) process is provided for forming a textured zinc oxide film pattern from a zinc oxide printed seed layer. The process provides a substrate and prints a zinc oxide seed layer in a pattern overlying the substrate. Using a CBD process, a textured zinc oxide film is grown overlying the zinc oxide seed layer pattern, where the textured zinc oxide film has a variation in film thickness of greater than 200 nanometers (nm). In one aspect, growing the textured zinc oxide film includes: preparing a ZnO precursor bath; maintaining a bath temperature of about 70 degrees C.; and, leaving the substrate in the bath for about an hour. In another aspect, growing the textured zinc oxide film includes forming a textured zinc oxide film with zinc oxide crystals having a pyramidal shape with a height of greater than 200 nm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.