Mixture for doping semiconductors
US8043946B2 · kind B2 · utility
0Cited by
7References
10Claims
0Family size
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Key dates
| Filing date | May 31, 2006 |
| Grant date | Oct 25, 2011 |
| Priority date | — |
| Expiry date | Mar 9, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/834
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A doping mixture for coating semiconductor substrates which are then subjected to a high temperature treatment to form a doped layer includes at least one p- or n-dopant, water and a mixture of two or more surfactants. At least one of the surfactants is nonionic. Also, provided are a method for producing such a doping mixture and the use thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.