Methods for making and using halosilylgermanes

US8043980B2 · kind B2 · utility

Assignee

• Arizona Board of Regents, a Body Corporate acting for and on behalf of Arizona State University · US

Inventors

• John Kouvetakis · Mesa, US
• Jesse B. Tice · Torrance, US
• Yan Fang · Irvine, US

Key dates

• Filing date: Apr 2, 2008
• Grant date: Oct 25, 2011
• Expiry date: May 3, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S438/933
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

The invention provides compounds of, and methods for the preparation of compounds of, the molecular formula, SixGeyHzaXa; wherein X is halogen, and x, y, z, and a are defined herein, and methods for the deposition of high-Ge content Si films on silicon substrates using compounds of the invention.