Determining process condition in substrate processing module

US8046193B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Forrest Gilbert Yetter, Jr. · Alexandria, US
• Jeffrey M. Parker · Apex, US
• Wayne G. Renken · San Jose, US
• John B. Pieper · Coralville, US

Key dates

• Filing date: Apr 21, 2008
• Grant date: Oct 25, 2011
• Expiry date: Dec 25, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B23/0254
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A sensor network collects time-series data from a process tool and supplies the data to an analysis system where pattern analysis techniques are used to identify structures and to monitor subsequent data based on analysis instructions or a composite model. Time-series data from multiple process runs are used to form a composite model of a data structure including variation. Comparison with the composite model gives an indication of tool health. A sensor network may have distributed memory for a more simplified configuration.