Vertically integrated 3-axis MEMS accelerometer with electronics
US8047075B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 21, 2007 |
| Grant date | Nov 1, 2011 |
| Priority date | — |
| Expiry date | Apr 30, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method in accordance with the present invention provides for a low cost, bulk micromachined accelerometer integrated with electronics. The accelerometer can also be integrated with rate sensors that operate in a vacuum environment. The quality factor of the resonances is suppressed by adding dampers. Acceleration sensing in each axis is achieved by separate structures where the motion of the proof mass affects the value of sense capacitors differentially. Two structures are used per axis to enable full bridge measurements to further reduce the mechanical noise, immunity to power supply changes and cross axis coupling. To reduce the sensitivity to packaging and temperature changes, each mechanical structure is anchored to a single anchor pillar bonded to the top cover.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.