Concave-convex surface inspection apparatus
US8049868B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 9, 2009 |
| Grant date | Nov 1, 2011 |
| Priority date | — |
| Expiry date | May 12, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/25
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A concave-convex surface inspection apparatus includes a slit light source unit emitting a slit light to a concave-convex surface of an object to be inspected, an image-taking unit taking an image of the concave-convex surface illuminated by the emitted slit light with an imaging optical axis intersecting with an optical axis of the slit light with a narrow-angle equal to or narrower than 30 degrees, and an evaluation section obtaining a three dimensional shape of the concave-convex surface and evaluating the obtained three dimensional shape, wherein the slit light source unit includes a slit light source and a cylindrical lens, the image-taking unit includes a telecentric lens unit, an image-taking section having an imaging surface tilted relative to the imaging optical axis for increasing a focusing range of the concave-convex surface, and a P polarizer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.