Lubricating micro-machined devices using fluorosurfactants
US8049946B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 4, 2010 |
| Grant date | Nov 1, 2011 |
| Priority date | — |
| Expiry date | Jun 4, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49004
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A method of lubricating MEMS devices using fluorosurfactants 42. Micro-machined devices, such as a digital micro-mirror device (DMD™) 940, which make repeated contact between moving parts, require lubrication in order to prevent the onset of stiction (static friction) forces significant enough to cause the parts to stick irreversibly together, causing defects. These robust and non-corrosive fluorosurfactants 42, which consists of a hydrophilic chain 40 attached to a hydrophobic fluorocarbon tail 41, are applied by nebulization and replace the more complex lubricating systems, including highly reactive PFDA lubricants stored in polymer getters, to keep the parts from sticking. This lubrication process, which does not require the use of getters, is easily applied and has been shown to provide long-life, lower-cost, operable MEMS devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.