Micro-electro-mechanical gyroscope with open-loop reading device and control method thereof
US8051698B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 2, 2008 |
| Grant date | Nov 8, 2011 |
| Priority date | — |
| Expiry date | Jul 8, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5726
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical gyroscope includes a first mass, which is able to oscillate along a first axis with respect to a fixed body, an inertial sensor having a second mass constrained to the first mass so as to oscillate along a second axis in response to a rotation of the gyroscope, a driving device coupled to the first mass that forms a control loop for maintaining the first mass in oscillation at a resonance frequency, and a reading device that detects displacements of the second mass along the second axis, which includes a charge amplifier for converting charge packets supplied by the inertial sensor into a charge-integration signal, and a low-pass filter. A calibration stage enables modification of a voltage between the second mass and the fixed body so as to minimize a component at a frequency that is twice the resonance frequency in the charge-integration signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.