Thin film piezoelectric actuators

US8053951B2 · kind B2 · utility

Assignee

• FUJIFILM Corporation · JP

Inventors

• Youming Li · San Jose, US
• Jeffrey Birkmeyer · San Jose, US

Key dates

• Filing date: Oct 22, 2009
• Grant date: Nov 8, 2011
• Expiry date: Nov 16, 2029

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N30/708

Abstract

A MEMS device with a thin piezoelectric actuator is described. A substrate with a first surface has a crystalline orientation prompting layer on the first surface. A piezoelectric portion contacts the crystalline orientation prompting layer and has an orientation corresponding to the orientation of the crystalline orientation prompting layer. A dielectric material surrounds the piezoelectric portion. The dielectric material is formed of an inorganic material.