Patent · US Active

Method and system for automatically managing probe mark shifts

US8054097B2 · kind B2 · utility

2Cited by

1References

19Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Sam Lin · Rancho Santa Margarita, US
Lin Chun Hung · Baoshan, TW
Tsung-Hsien Chen · New Taipei, TW

Key dates

Filing date	Mar 6, 2007
Grant date	Nov 8, 2011
Priority date	—
Expiry date	Jun 29, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2891
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Disclosed is a method and a system for automatically managing probe mark shifts. A determination is made from test data as to whether a die on a wafer is defective. A probe mark check on the wafer is made to determine whether a probe mark is shifted. Necessary recovery action is performed in response to the probe mark being shifted. In the probe mark check, a plurality of probe mark positions are selected from the test data. A determination is then made as to whether at least one of the plurality of probe mark positions violates an engineering rule.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.