Polyoxometalate compositions and methods
US8057561B2 · kind B2 · utility
2Cited by
5References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 11, 2006 |
| Grant date | Nov 15, 2011 |
| Priority date | — |
| Expiry date | Feb 21, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/2998
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
The invention provides an isolated, particulate polyoxometalate complex comprising a water-soluble cationic polymer and a polyoxometalate compound ionically bound to the cationic polymer. The polyoxometalate compound can be an isopolyoxometalate compound, such as an isopolytungstate, or a heteropolyoxometalate compound. The invention further provides a chemical-mechanical polishing composition comprising a preformed polyoxometalate abrasive, as well as a method of chemically-mechanically polishing a substrate therewith.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.