Patent · US Active

Method and apparatus for forming carbon nanotube array

US8057778B2 · kind B2 · utility

6Cited by

2References

20Claims

0Family size

Assignee

Beijing FUNATE Innovation Technology Co., LTD. · CN

Inventors

Chen Feng · Beijing, CN
Liang Liu · Beijing, CN

Key dates

Filing date	Aug 13, 2010
Grant date	Nov 15, 2011
Priority date	—
Expiry date	Aug 13, 2030

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S977/843
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The present disclosure relates to a method for forming a carbon nanotube array. In the method a tubular substrate is provided. The tubular substrate includes an outer sidewall with a catalyst layer located on the outer sidewall. The heating member, and the tubular substrate with the catalyst layer is received in a reacting chamber. The tubular substrate is heated by the heating member. A carbon source gas is supplied into the reacting chamber to grow the carbon nanotube array on the tubular substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.