Patent · US Active

Chemically amplified positive resist composition

US8057983B2 · kind B2 · utility

0Cited by
2References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 17, 2009
Grant dateNov 15, 2011
Priority date—
Expiry dateAug 31, 2029

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S430/111
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

The present invention provides a chemically amplified resist composition comprising:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.