Method and apparatus for modifying a ribbon-shaped ion beam
US8058626B2 · kind B2 · utility
13Cited by
5References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 10, 2010 |
| Grant date | Nov 15, 2011 |
| Priority date | — |
| Expiry date | Jul 9, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/30477
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A ribbon-shaped ion beam having an elongate cross-section normal to a beam direction is modified by generating, at a predetermined position along the ribbon-shaped beam, a magnetic field extending in an x-direction along an x-axis. The x-direction magnetic field has a non-uniform intensity which is a desired function of x.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.