Method of manufacturing piezoelectric vibrator, piezoelectric vibrator, oscillator, electronic device, and radio-clock
US8058778B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 16, 2010 |
| Grant date | Nov 15, 2011 |
| Priority date | — |
| Expiry date | Aug 16, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
There is provided a piezoelectric vibrator 1 that includes a base substrate 2, a lid substrate 3, a piezoelectric vibrating reed 4, a pair of external electrodes 38 and 39, a pair of through electrodes 32 and 33, and routing electrodes 36 and 37. The lid substrate 3 includes a recess 3a for a cavity and is bonded to the base substrate so that the recess faces the base substrate. The piezoelectric vibrating reed 4 is bonded to the upper surface of the base substrate in a cavity that is formed between both the substrates. The pair of external electrodes 38 and 39 is formed on the lower surface of the base substrate. The pair of through electrodes 32 and 33 is formed so as to pass through the base substrate and is electrically connected to the pair of external electrodes, respectively. The routing electrodes 36 and 37 are formed on the upper surface of the base substrate and electrically connect the pair of through electrodes to the piezoelectric vibrating reed. The through electrodes include electrode films 32a and 33a that are formed on the inner surfaces of the through holes 30 and 31, and glass bodies 32b and 33b that are fixed to the inner surfaces of the through holes with the e…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.