Separation of chlorosilanes
US8062483B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 2006 |
| Grant date | Nov 22, 2011 |
| Priority date | — |
| Expiry date | Oct 21, 2028 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/20
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
Crude chlorosilane streams containing lower-boiling chlorosilanes and higher-boiling chlorosilanes are separated by contacting them with a distillation aid. The lower-boiling chlorosilanes are separated from the crude chlorosilane stream, and then the distillation aid and the higher-boiling chlorosilanes are separated from one another. The distillation aid is a mono-cyano-substituted organic compound, a nitro-substituted organic compound, a mono-cyano-substituted organosilicon compound, a nitro-substituted organosilicon compound, or a mixture thereof. These distillation aids increase the relative volatility of crude chlorosilane streams such as methyltrichlorosilane and dimethyldichlorosilane resulting in improved separation at lower capital and/or fixed costs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.