Inertial positioner and an optical instrument for precise positioning
US8063383B2 · kind B2 · utility
4Cited by
16References
31Claims
0Family size
Inventors
Key dates
| Filing date | Nov 4, 2008 |
| Grant date | Nov 22, 2011 |
| Priority date | — |
| Expiry date | Nov 15, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.