Nanomechanical oscillator
US8063535B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2006 |
| Grant date | Nov 22, 2011 |
| Priority date | — |
| Expiry date | Sep 16, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02527
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.