Power supply regulating apparatus, semiconductor manufacturing apparatus, method for controlling power to heater, and method for manufacturing semiconductor device
US8064233B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 12, 2005 |
| Grant date | Nov 22, 2011 |
| Priority date | — |
| Expiry date | Sep 2, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02M1/0022
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A supplying power adjusting apparatus has excellent temperature response and excellent stabilities to power supply change and load change. The apparatus is provided with a semiconductor inverter for high-speed switching power control, which converts a direct current rectified by a rectifying circuit (10) into alternating current power in response to a control signal and supplies a heater (7) with the power; a temperature change detecting circuit (24) for detecting the temperature change of the heater (7); a power supply change detecting circuit (22) for detecting the power change of the rectifying circuit (10); a load change detecting circuit (23) for detecting the change of the alternating current power supplied to the heater (7); and a power control signal generating circuit (15) which calculates a power quantity to be supplied to the heater (7) and controls the frequency or duty ratio of a control signal to be added to the power controlling semiconductor inverter in response to the calculated results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.