Patent · US Active

Method for depositing a polymer layer on a surface of a support comprising at least a recessed zone

US8067060B2 · kind B2 · utility

0Cited by

4References

9Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Christiane Puget · St-Estève, FR
David Henry · Meylan, FR

Key dates

Filing date	Jan 14, 2008
Grant date	Nov 29, 2011
Priority date	—
Expiry date	Sep 1, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/162
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A polymer layer is deposited on a surface of a support, said surface comprising a flat main part and at least one recessed zone with respect to the flat main part. The polymer layer is achieved by at least the following successive steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.