Electromagnetic radiation detector with nanowire thermometer and method for producing same
US8067736B2 · kind B2 · utility
14Cited by
1References
15Claims
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Key dates
| Filing date | Oct 30, 2008 |
| Grant date | Nov 29, 2011 |
| Priority date | — |
| Expiry date | Feb 20, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/023
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The electromagnetic radiation detector comprises at least one membrane suspended above a substrate by at least one nanowire. The nanowire forms a thermoelement comprising an electrically conducting core and external layer, respectively doped of different types and insulated form one another by an electrical insulation layer. When the substrate and membrane are at different temperatures, the nanowires constitutes a thermometer providing measurement signals, by Seebeck effect, representative of heating the membrane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.