Patent · US Active

Methods for introduction of a reactive material into a vacuum chamber

US8071019B2 · kind B2 · utility

6Cited by

6References

20Claims

0Family size

Assignee

HONEYWELL INTERNATIONAL INC. · US

Inventors

Alan Bruce Touchberry · St. Louis Park, US
Terry Dean Stark · Virginia, US

Key dates

Filing date	Oct 31, 2008
Grant date	Dec 6, 2011
Priority date	—
Expiry date	Sep 2, 2030

Classification

Technology area (CPC G)Physics
CPC primaryG04F5/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Methods for the introduction of a reactive material into a vacuum chamber while minimizing or eliminating the simultaneous introduction of contaminating materials or substances. As a result, contaminating materials and substances that can interfere with any measurements or other processes that occur in the vacuum chamber are minimized or eliminated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.