Solid immersion lens optics assembly
US8072699B2 · kind B2 · utility
2Cited by
8References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 17, 2009 |
| Grant date | Dec 6, 2011 |
| Priority date | — |
| Expiry date | Dec 23, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/33
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A solid immersion lens optics assembly, a test station for probing and testing of integrated circuits on a semiconductor wafer, and a method of landing a SIL on an object. The optics assembly comprises an objective lens housing for receiving an objective lens, and a solid immersion lens (SIL) housing for mounting an SIL and adapted for connection to the objective lens housing; wherein a peripheral wall of the SIL housing comprises an integrated spring section adapted to provide a biased support for the SIL.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.