Multiple element electrode cMUT devices and fabrication methods
US8076821B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 2010 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Jun 30, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N29/2406
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Multiple electrode element capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. Some embodiments can include a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy. The forward or side looking intravascular device can generally comprise a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement. The plurality of cMUT arrays can each comprise a plurality of cMUT elements. At least a portion of the plurality of cMUT elements can comprise a flexible membrane disposed above the substrate and a multiple element electrode. The multiple element electrode can comprise a plurality of electrode elements shaped and sized to have a width less than the width of the membrane, and be further configured to operatively shape the membrane in a reception state to receive ultrasonic energy and a transmission state to transmit ultrasonic energy.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.