Imaging semiconductor structures using solid state illumination
US8077305B2 · kind B2 · utility
29Cited by
109References
38Claims
0Family size
Inventors
Key dates
| Filing date | Apr 19, 2005 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Apr 19, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/956
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention consists of a camera, light sources, lenses and software algorithms that are used to image and inspect semiconductor structures, including through infrared radiation. The use of various configurations of solid state lighting and software algorithms enhances the imaging and inspection.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.