Illumination system for optical inspection
US8077307B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 9, 2008 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Nov 30, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/95638
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus for optical inspection includes an illumination assembly, including multiple parallel rows of light sources for emitting light and illumination optics associated with each row for directing the light onto an object under inspection. The multiple parallel rows include at least a first row with first illumination optics including a first array of prisms that are configured to reflect the light emitted by the light sources in the first row, and at least a second row with second illumination optics including a second array of prisms that are configured to refract the light emitted by the light sources in the second row. An imaging assembly is configured to capture an image of the object under illumination by the multiple parallel rows of the light sources.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.