Methods, systems and computer program products for characterizing structures based on interferometric phase data
US8077325B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2009 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Dec 17, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/1787
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.