Bar-shaped semiconductor laser chip and method of fabrication thereof
US8077751B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2009 |
| Grant date | Dec 13, 2011 |
| Priority date | — |
| Expiry date | Oct 5, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/320275
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A bar-shaped semiconductor laser chip that can hold down a variation in oscillation wavelength is provided. The bar-shaped semiconductor laser chip has a nitride semiconductor substrate and a semiconductor layer formed on the main surface of the nitride semiconductor substrate and including a plurality of laser chip portions. The plurality of laser chip portions are arrayed in the [11-20] direction. The main surface of the nitride semiconductor substrate is a (0001) plane having an off-angle in the direction along the [11-20] direction. The central part of the main surface of the nitride semiconductor substrate has an off-angle of 0.05±0.1 degrees from the (0001) plane in the direction along the [11-20] direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.