Ceramic pressure sensors and method for producing the same
US8079268B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 5, 2007 |
| Grant date | Dec 20, 2011 |
| Priority date | — |
| Expiry date | Sep 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to the field of multilayer ceramics and relates to ceramic pressure sensors, such as can be used, for example, for industrial process control. The object of the invention is to disclose ceramic pressure sensors that are mounted in a largely mechanically stress-free manner and have a long service life, and the production of which is more effective and more cost-effective. The object is attained with ceramic pressure sensors, comprising a support of tapes, wherein the tape(s) embody at least one cavity that is covered with at least one ceramic pressure membrane tape or in which a ceramic pressure membrane tape covering the cavity is located, and wherein the tape(s) have at least one supply line for the pressure connection to the cavity, and the tape composite is sintered. The object is further attained with a method for production, in which at least one tape is structured for producing a cavity, at least one pressure membrane tape is positioned on the cavity for covering, and subsequently the tape composite is sintered.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.