Patent · US Active

End effector for nano manufacturing

US8079278B2 · kind B2 · utility

9Cited by

4References

16Claims

0Family size

Assignee

BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY · US

Inventors

Ning Xi · Okemos, US
Uchechukwu C. Wejinya · Fayetteville, US
Yantao Shen · Beijing, CN

Key dates

Filing date	Jul 21, 2006
Grant date	Dec 20, 2011
Priority date	—
Expiry date	Jan 15, 2028

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/53991
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

An end-effector is provided for use on a micro/nano manipulation device. The end-effector is comprised of: a micropump fluidly coupled to a microtube; a piezoelectric sensing structure disposed in the microtube; and a processing circuit electrically coupled to the sensing structure for determining the force of the fluid flowing through the microtube. The end-effector is a closed loop control-enabled micro/nano manipulation system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.