Methods and sytems for the destruction of perfluorinated compounds
US8080226B2 · kind B2 · utility
0Cited by
1References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2007 |
| Grant date | Dec 20, 2011 |
| Priority date | — |
| Expiry date | Apr 5, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Methods and systems for the destruction of one or more PFCs in a gas stream are provided. The gas stream can come from semiconductor processing, for example. The PFCs in the gas stream are reacted with steam in the presence of a catalyst to fragment the PFCs into other compounds that are readily removed from the gas stream. The catalyst comprises gallium, and can additionally comprise zirconium oxide. The gas stream can also be pre-treated prior to reacting the PFCs with steam to remove substances that could be deleterious to the catalyst.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.