Patent · US Active

In-line process for making thin film electronic devices

US8080366B2 · kind B2 · utility

0Cited by

5References

30Claims

0Family size

Assignee

OTB Solar B.V. · NL

Inventors

Ronaldus Joannes Cornelis Maria Kok · Eindhoven, NL
Marinus Evers · Heeze, NL
Franciscus Cornelius Dings · Veldhoven, NL

Key dates

Filing date	Feb 23, 2007
Grant date	Dec 20, 2011
Priority date	—
Expiry date	Sep 20, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH10K59/12
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An in-line process for making a thin film electronic device on a substrate is described comprising the steps of: a) depositing a structurable layer onto a substrate; b) depositing a patternable material onto the structurable layer in a first pattern; and c) etching the structurable layer in areas uncovered by the patternable material. The steps are carried out without intermediate exposure of the substrate to ambient air.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.