Inertial sensor with dual cavity package and method of fabrication

US8080925B2 · kind B2 · utility

Assignee

• Custom Sensors & Technologies, Inc. · US

Inventors

• William Paul Berger · Martinez, US
• Mark A. Collins · Dripping Springs, US
• Michael Thomas Frazee · Martinez, US
• Thad W. (Marc) Smith · Antioch, US
• Robert Albert Anderson · Walnut Creek, US
• Stuart John Knowles · Walnut Creek, US
• Victor Dragotti · Danville, US

Key dates

• Filing date: Sep 23, 2008
• Grant date: Dec 20, 2011
• Expiry date: Jun 24, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/4908
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Inertial sensor having a body with first and second cavities on opposite sides thereof, a sensing element in the first cavity, electronic circuitry in the second cavity, electrical conductors interconnecting the sensing element and the circuitry, and leads connected electrically to the circuitry and extending from the body for mounting the sensor and making connections with the circuitry.