Position controlling device
US8082048B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 8, 2008 |
| Grant date | Dec 20, 2011 |
| Priority date | — |
| Expiry date | Jan 7, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49176
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A structure is provided in which a thrust feed forward structure for operating a structure to be driven without vibration and a control structure which simultaneously compensates for positional deviation caused by the thrust feed forward structure and positional deviation caused by a base displacement are included in a position controlling device (3). Alternatively, a structure is provided in which an acceleration and deceleration process for realizing response of the position of the structure to be driven and base displacement without vibration and a control structure which determines a feed forward amount with respect to a position instruction value after the acceleration and deceleration process are provided to the position controlling device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.