Photoelectric conversion apparatus, producing method therefor, image pickup module and image pickup system
US8084287B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 30, 2010 |
| Grant date | Dec 27, 2011 |
| Priority date | — |
| Expiry date | Dec 30, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10F39/8063
Abstract
A photoelectric conversion apparatus has a plurality of photoelectric conversion elements arranged on a semiconductor substrate, a plurality of wiring layers arranged on the semiconductor substrate through the first and second insulation layers, and a high refractive index region which is arranged in an opening part that is arranged in the interlayer insulation layer so as to correspond to the photoelectric conversion element and has a higher refractive index than the interlayer insulation layers, wherein an area of a cross section parallel to a photoreceiving plane of the photoelectric conversion element in the high refractive index region increases as the position approaches to an upper part of the substrate from a photoreceiving plane of the photoelectric conversion element, namely, as the position approaches to a light-incident plane, and the increasing rate continuously increases with the increase of the area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.