System and method for laser processing at non-constant velocities
US8084706B2 · kind B2 · utility
6Cited by
100References
26Claims
0Family size
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Key dates
| Filing date | Sep 15, 2006 |
| Grant date | Dec 27, 2011 |
| Priority date | — |
| Expiry date | Aug 11, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output. The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.