Scanning stylus atomic force microscope with cantilever tracking and optical access
US8087288B1 · kind B1 · utility
1Cited by
1References
3Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 9, 1997 |
| Grant date | Jan 3, 2012 |
| Priority date | — |
| Expiry date | Oct 13, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/87
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanned-stylus atomic force microscope (AFM) employing the optical lever technique, and method of operating the same. The AFM of the invention includes a light source and a scanned optical assembly which guides light emitted from the light source onto a point on a cantilever during scanning thereof. A moving light beam is thus created which will automatically track the movement of the cantilever during scanning. The invention also allows the light beam to be used to measure, calibrate or correct the motion of the scanning mechanism, and further allows viewing of the sample and cantilever using an optical microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.