Interconnect for MEMS device including a viscoelastic septum
US8087310B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2009 |
| Grant date | Jan 3, 2012 |
| Priority date | — |
| Expiry date | May 24, 2030 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/1352
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a micro electro mechanical systems (MEMS) device for use with an elongate structure. The MEMS device includes a generally planar substrate, a device wall layer formed upon the substrate, a septum cavity formed in the device wall layer, a channel formed in the device wall layer in fluid communication with the septum cavity, and a septum element disposed in the septum cavity. The septum element is formed of a viscoelastic material. The septum element defines a septum entry surface and a septum exit surface with the septum exit surface being exposed to the channel and disposed between the septum entry surface and the channel. The septum element is without any openings formed through the septum element extending between the septum entry and exit surfaces. Methods of manufacturing and interacting with the MEMS device are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.