Patent · US Active

Illumination means and inspection means having an illumination means

US8087799B2 · kind B2 · utility

4Cited by

8References

21Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Kurt Hahn · Gießen, DE
Michael Hofmann · Taufkirchen, DE
Christof Krampe-Zadler · Castrop-Rauxel, DE

Key dates

Filing date	Sep 29, 2008
Grant date	Jan 3, 2012
Priority date	—
Expiry date	Jul 26, 2029

Classification

Technology area (CPC G)Physics
CPC primaryG01N2201/0634
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An illumination mean for the inspection of flat substrates is disclosed. The flat substrate includes an upper edge area, a lower edge area and a front area. The illumination means is formed as an annular segment and comprises an opening into which at least the edge area of the flat substrate extends. A plurality of light sources are arranged on an annular segment in a housing. Inside the housing, a reflective element is provided so that the light from the light sources does not impinge perpendicularly on the upper edge area, the lower edge area and the front area of the flat substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.