Patent · US Active

Method for correcting astigmatism in electron emission spectromicroscopy imaging

US8089044B2 · kind B2 · utility

0Cited by

11References

15Claims

0Family size

Assignee

COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

Olivier Renault · Palaiseau, FR
Maylis Lavayssiere · Grenoble, FR
Denis Mariolle · Grenoble, FR

Key dates

Filing date	Dec 15, 2009
Grant date	Jan 3, 2012
Priority date	—
Expiry date	Jul 17, 2030

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/26
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method for correcting astigmatism of an electronic optical column of an electron emission spectromicroscope, comprising the steps of:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.