Protection system for diaphragm of MEMS device
US8091430B1 · kind B1 · utility
0Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 2010 |
| Grant date | Jan 10, 2012 |
| Priority date | — |
| Expiry date | Sep 30, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for protecting a diaphragm of a microelectromechanical systems (MEMS) device includes a housing coupled to the MEMS device such that its sensing diaphragm is surrounded thereby. A perforated barrier in the housing is adjacent to the sensing diaphragm. A protection diaphragm in the housing has its first side exposed to an external environment of interest, and has its second side facing the perforated barrier and spaced apart therefrom. A fluid is disposed contiguously between the second side of the protection diaphragm and the sensing diaphragm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.