Patent · US Active

Lens module comprising at least one exchangeable optical element

US8092029B2 · kind B2 · utility

0Cited by

1References

37Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Guido Soyez · Ludwigsburg, DE
Stephan Back · Langenau, DE
Joachim Buechele · Lauchheim, DE
Julian Kaller · Oberkochen, DE
Guido Limbach · Aalen, DE
Harald Woelfle · Waldkirch, DE

Key dates

Filing date	Dec 23, 2005
Grant date	Jan 10, 2012
Priority date	—
Expiry date	Jul 14, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70933
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Disclosed is a lens module, especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element that is disposed in a lens housing. At least one gas exchange device is positioned in an area of the replaceable optical element in such a way that a receiving zone for the replaceable optical element can be flushed when the optical element is replaced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.