Method of micro/nano imprinting
US8092737B2 · kind B2 · utility
20Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2008 |
| Grant date | Jan 10, 2012 |
| Priority date | — |
| Expiry date | Sep 29, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29C2059/023
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
Disclosed is a method of micro/nano imprinting, which applies soft mold, pre-shaping sealing film, and soft holder arrangements to the micro/nano structure imprinting process of the curved substrates. The method of the present invention can prevent the curved surface from crumbling, which may result from high gas pressuring, and can obtain uniform imprinting pressure distribution throughout the whole curved substrate. Moreover, replicating micro/nano structures onto double-sided curve, both convex and concave, surfaces can also be achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.