Thermal diffusion chamber

US8097085B2 · kind B2 · utility

Assignee

• POOLE VENTURA, INC. · US

Inventors

• Mark R. Erickson · Oxnard, US
• Aaron L. Dingus · Moorpark, US
• Arthur W. Custer, III · Ventura, US
• Henry J. Poole · Ventura, US
• Nader Jamshidi · Newbury Park, US

Key dates

• Filing date: Jan 28, 2011
• Grant date: Jan 17, 2012
• Expiry date: Jan 28, 2031

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/4935
• WIPO field: Thermal processes and apparatus
• WIPO sector: Mechanical engineering

Abstract

A frame supporting a containment chamber, the containment chamber is preferably configured to enclose and confine a process chamber. A heat source module is disposed between the containment chamber and the process chamber, while a thermal regulation cavity is maintained between the heat source module and the process chamber. Preferably, at least one fluid inlet box is in fluidic communication with the thermal regulation cavity, in which the fluid inlet box provides a plate valve that mitigates the flow of fluids from the thermal regulation cavity through the fluid inlet box and to an environment external to the thermal regulation cavity. Additionally, the preferred fluid inlet box further includes a flow adjustment structure interacting with the plate valve to control fluid flow from the environment external to the thermal regulation cavity past the plate valve and into thermal regulation cavity.