Manufacturing a MEMS element having cantilever and cavity on a substrate
US8097483B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 15, 2008 |
| Grant date | Jan 17, 2012 |
| Priority date | — |
| Expiry date | Oct 15, 2028 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0107
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Method for manufacturing a capacitor on a substrate, the capacitor including a first electrode (5) and a second electrode (12; 25), the first and second electrodes being separated by a cavity (16; 32), the substrate including an insulating surface layer (3), the first electrode (5) being arranged on the insulating surface layer a first metal body (7a; 20) being adjacent to the first electrode and arranged as anchor of the second electrode (12; 25) the second electrode being arranged as a beam-shaped body (12; 25) located on the first metal body and above the first electrode; the cavity (16; 32) being laterally demarcated by a sidewall of the first metal body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.