MEMS sensor with cap electrode
US8100012B2 · kind B2 · utility
15Cited by
45References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 11, 2008 |
| Grant date | Jan 24, 2012 |
| Priority date | — |
| Expiry date | Feb 20, 2029 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS sensor includes a substrate having a MEMS structure movably attached to the substrate, a cap attached to the substrate and encapsulating the MEMS structure, and an electrode formed on the cap that senses movement of the MEMS structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.