Magnetic particle trapper for a disk sputtering system
US8101054B2 · kind B2 · utility
70Cited by
16References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2009 |
| Grant date | Jan 24, 2012 |
| Priority date | — |
| Expiry date | Jul 23, 2030 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/564
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A magnetic particle trapper for use in a sputtering system includes a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system, and a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.